AwardedSuppliesEuropeanOpen
Plasma Enhanced Atomic Deposition System
Stichting Nederlandse Wetenschappelijk Onderzoek Instituten (NWO-I) · Open · 1 lots · 350474
6
6 of 6 core insights found
Measures presence, not accuracy · documents remain authoritative
ScopeAdvicePoints of attentionSuitability requirementsAward criteriaTimeline
Type
Supplies
38000000
Estimated value
€ 550K
estimated
To deadline
Ongoing
Knock-outs
1
exclusion grounds
Award basis
Best price-quality ratio
1 criteria
Assess manuallyconfidence high
Delivery and installation of an advanced PE-ALD system for research applications at AMOLF. The award is based on the lowest comparable price after deduction of the value.
Supplies · Open · European procedure
European1 exclusion groundsComplete timeline
CharacteristicsCPV 38SuppliesEU tenderplasma enhanced atomic depositionPECVDALD
01What is being requested
Delivery of a Plasma Enhanced Atomic Layer Deposition system for use in an ISO 6/7 cleanroom. The assignment includes production, delivery (DDP), installation, commissioning, a Site Acceptance Test, documentation, training, and a warranty period of 1 year including 4 years of maintenance.
The Product should coat layers with high uniformity and structures with high aspect ratios. It should be possible to tune the optical properties, density and stress in the films by adjusting deposition parameters. The The The Product should be capable of depositing the following materials: Al2O3, TiO2, ZnO, In2O3, SnO2, NiOx, SiO2 and HfO2, with the option to easily switch to different materials, such as nitrides like AlN and TiN and metallic layers like Pt and Ru.
1Plasma enhanced atomic layer deposition€550
02Outcome
Awarded
Veeco GmbH
Award value
€549,999
vs. estimate
0%
Bidders
2
03Strategic insight
Strategic insight · AI analysis
Ensure a very sharp registration price as the award is based on the lowest comparable price. Check whether the system meets the specific material requirements such as Al2O3 and TiO2. Ensure that the warranty and maintenance are fully included in the total price.
04Points of attention
Important · 4
The system must be a through-the-wall-solution with operation on both sides.Important
The quotation must separately specify the maintenance contract costs for 4 years.Important
Bids with reservations or conditions will lead to exclusion.Important
The Site Acceptance Test is a requirement for the final award and agreement.Important
05Can I take part?
Financial · 1
Financial and economic standing may be assessed via the ESPD.Financial
Technical · 1
Technical ability may be assessed via the ESPD.Technical
Professional capability · 1
Professional ability may be assessed via the ESPD.Professional capability
Exclusion ground · 1
Exclusion grounds as stated in sections 2.86 and 2.87 of the Public Procurement Act 2012.Exclusion ground
06Exclusion grounds
Exclusion grounds (1)
- Exclusion grounds as stated in sections 2.86 and 2.87 of the Public Procurement Act 2012.
07Award criteria
Awarding on valueweight n/a
The value is deducted from the offered registration price. The downwardly adjusted registration price forms the comparable price. The bidder with the lowest comparable price is eligible for the award.
08Process & timeline
Publication of documents
23-09-2024
Submission of questions/comments
[telefoonnummer verwijderd]:00
Publication of Information notice
11-10-2024
Submission of bids
[telefoonnummer verwijderd]:00
Provisional award
29-11-2024
End of standstill period
20-12-2024
Signing of agreement
Vanaf 20-12-2024
09Value in context
€550,000
10Bidders in this segment
#Likely bidderFitWins
1Bruker Nederland B.V.SME8213×
2Agilent Technologies Netherlands B.V.SME8110×
3Bluefors OyUnknown7911×
4Waters Chromatography B.V.SME7812×
5Oxford Instruments GmbHUnknown775×
6FEI Europe B.V.SME747×
11Tender documents
TN487811 - EF29 Aankondiging gegunde opdracht - algemene richtlijn, standaardregeling 20250129112903pdfJan 30, 2025 · 10 KB
Information NoticepdfOct 11, 2024 · 98 KB
Annex 1 Question FormxlsxOct 4, 2024 · 32 KB
TN487811 - EF16 Aankondiging van een opdracht - algemene richtlijn, standaardregeling 20240923172741pdfSep 25, 2024 · 9 KB
Annexes ALD TenderzipSep 25, 2024 · 3049 KB
Descriptive document ALD Tender - 20240923 - FinalpdfSep 25, 2024 · 331 KB
12Legal themes that may be relevant here
Advies 688> Nee. De scope van het onderhoudscontract moet zo worden uitgelegd, dat daaronder niet alle overspanningswerkzaamheden vallen. AaAdvies 575: Innovatiepartnerschap: selectie en toetreding tot partnerschapDe Commissie beoordeelt de toepassing van het innovatiepartnerschap en de wijze waarop partners zijn geselecteerd voor deelname.Complaint dismissed
13Frequently asked questions
Which technical specifications must the Plasma Enhanced Atomic Deposition System meet?
The system must be able to coat layers with high uniformity and structures with high aspect ratios. Additionally, it must be possible to adjust the optical properties, density, and stress in the films by changing the deposition parameters.
Which materials must the system be able to deposit?
The product must be capable of depositing Al2O3, TiO2, ZnO, In2O3, Sn2O, NiOx, SiO2, and HfO2. There must also be an option to easily switch to other materials, such as nitrides (AlN and TiN) and metals (Pt and Ru).
What is the nature of the assignment?
The assignment concerns the delivery of a Plasma Enhanced Atomic Layer Deposition System for use in a research environment.
Automatically compiled from the official tender data and documents.
14Estimated value versus the market
p25
€ 300K
€ 300K
median
€ 515K
€ 515K
p75
€ 1,7 mln
€ 1,7 mln
€ 550K
Gegunde waarden in CPV 38 · leveringen n=331